http://dspace.bsu.edu.ru/handle/123456789/4727| Title: | Effect of internal stress on the surface morphology of hard nanoscale carbon coatings |
| Authors: | Kolpakov, A. Y. Galkina, M. E. Goncharov, I. Yu. Sudzhanskaya, I. V. Poplavskii, A. I. |
| Keywords: | chemical technology equipment chemical production ion energy magnitude of internal stress electric conductivity surface morphology nitrogenated carbon coatings silicon produced vacuum-arc technique |
| Issue Date: | 2008 |
| Citation: | Effect of internal stress on the surface morphology of hard nanoscale carbon coatings / A.Y. Kolpakov, M.E. Galkina, I.Yu. Goncharov, et al. ; Belgorod State University // Nanotechnologies in Russia. - 2008. - Vol.3, N9-10.-P. 581-586. - doi: 10.1134/S1995078008090073. |
| Abstract: | The influence of ion energy on the magnitude of internal stress, electric conductivity, and surface morphology of nitrogenated carbon coatings on silicon produced by the pulsed vacuum-arc technique has been studied by scanning electron microscopy and scanning probe microscopy |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/4727 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Kolpakov_Effect.pdf | 640.56 kB | Adobe PDF | View/Open |
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