| DC Field | Value | Language |
|---|
| dc.contributor.author | Kolpakov, A. Y. | - |
| dc.contributor.author | Galkina, M. E. | - |
| dc.contributor.author | Goncharov, I. Yu. | - |
| dc.contributor.author | Sudzhanskaya, I. V. | - |
| dc.contributor.author | Poplavskii, A. I. | - |
| dc.date.accessioned | 2013-05-20T08:17:05Z | - |
| dc.date.available | 2013-05-20T08:17:05Z | - |
| dc.date.issued | 2008 | - |
| dc.identifier.citation | Effect of internal stress on the surface morphology of hard nanoscale carbon coatings / A.Y. Kolpakov, M.E. Galkina, I.Yu. Goncharov, et al. ; Belgorod State University // Nanotechnologies in Russia. - 2008. - Vol.3, N9-10.-P. 581-586. - doi: 10.1134/S1995078008090073. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/4727 | - |
| dc.description.abstract | The influence of ion energy on the magnitude of internal stress, electric conductivity, and surface morphology of nitrogenated carbon coatings on silicon produced by the pulsed vacuum-arc technique has been studied by scanning electron microscopy and scanning probe microscopy | ru |
| dc.language.iso | en | ru |
| dc.subject | chemical technology | ru |
| dc.subject | equipment | ru |
| dc.subject | chemical production | ru |
| dc.subject | ion energy | ru |
| dc.subject | magnitude of internal stress | ru |
| dc.subject | electric conductivity | ru |
| dc.subject | surface morphology | ru |
| dc.subject | nitrogenated carbon coatings | ru |
| dc.subject | silicon produced | ru |
| dc.subject | vacuum-arc technique | ru |
| dc.title | Effect of internal stress on the surface morphology of hard nanoscale carbon coatings | ru |
| dc.type | Article | ru |
| dc.identifier.citationpublication | Nanotechnologies in Russia | ru |
| dc.identifier.citationnumber | 9-10 | ru |
| dc.identifier.citationvolume | 3 | ru |
| dc.identifier.citationfirstpage | 581 | ru |
| dc.identifier.citationendpage | 586 | ru |
| dc.description.refereed | yes | ru |
| dc.description.institution | Belgorod State University | ru |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
|
