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Title: RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures
Authors: Zakhvalinskii, V. S.
Goncharov, I. Yu.
Kudryavtsev, E. A.
Piluk, E. A.
Kolesnikov, D. A.
Keywords: physics
solid state physics
RF magnetron sputtering
thin films
solar cells
atomic force microscopy
Issue Date: 2014
Citation: RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures / V. S. Zakhvalinskii [и др.] // Journal of Nanoelectronics and Optoelectronics. - 2014. - Vol.9, №4.-P. 570-575. - doi:
Abstract: Here we report the feasibility of using cheap and environmentally friendly RF-magnetron sputtering of Si3N4 and formation of Si3N4 nanostructured films with developed surface. p-Si(100) polished plates commonly used in photovoltaic structures were chosen as a substrate. Si3N4 film surface morphology was studied using atomic force microscopy
Appears in Collections:Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)

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