http://dspace.bsu.edu.ru/handle/123456789/15686| Title: | RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures |
| Authors: | Zakhvalinskii, V. S. Goncharov, I. Yu. Kudryavtsev, E. A. Piluk, E. A. Kolesnikov, D. A. |
| Keywords: | physics solid state physics nano-patterns RF magnetron sputtering thin films solar cells atomic force microscopy |
| Issue Date: | 2014 |
| Citation: | RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures / V. S. Zakhvalinskii [и др.] // Journal of Nanoelectronics and Optoelectronics. - 2014. - Vol.9, №4.-P. 570-575. - doi: http://dx.doi.org/10.1166/jno.2014.1627. |
| Abstract: | Here we report the feasibility of using cheap and environmentally friendly RF-magnetron sputtering of Si3N4 and formation of Si3N4 nanostructured films with developed surface. p-Si(100) polished plates commonly used in photovoltaic structures were chosen as a substrate. Si3N4 film surface morphology was studied using atomic force microscopy |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/15686 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Zakhvalinskii_RF-magnetron_14.pdf | 327.52 kB | Adobe PDF | View/Open |
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