http://dspace.bsu.edu.ru/handle/123456789/4728| Title: | The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon |
| Authors: | Kolpakov, A. Ya. Druchinina, O. A. Kharchenko, V. A. |
| Keywords: | equipment chemical production silicon wafers ions nitrogen ions carbon coating compressive stresses resistance silicon silicon |
| Issue Date: | 2009 |
| Citation: | The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon / A.Ya. Kolpakov, O.A. Druchinina, V.A. Kharchenko ; Belgorod State University // Nanotechnologies in Russia. - 2009. - Vol.4, N3-4.-P. 166-169.. - doi: 10.1134/S1995078009030033. |
| Abstract: | The behavior of silicon wafers in the starting state (after both irradiation with nitrogen ions and after nitrogen ion irradiation and the deposition of an 80-nm-thick carbon coating) has been investigated |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/4728 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Kolpakov_The Effect that Nitrogen.pdf | 505.26 kB | Adobe PDF | View/Open |
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