http://dspace.bsu.edu.ru/handle/123456789/41857| Title: | Production, Structure and Properties of Coatings Based on Al₂O₃ Obtained by Magnetron Method |
| Authors: | Kolesnikov, D. A. Sudzhanskaya, I. V. Novikov, V. Yu. Kudryavtsev, E. A. Krytsyna, E. V. |
| Keywords: | technique metal science magnetron by sputtering multilayer oxide coatings structure |
| Issue Date: | 2020 |
| Citation: | Production, Structure and Properties of Coatings Based on Al₂O₃ Obtained by Magnetron Method / D.A. Kolesnikov [et al.] // Journal of Nano- and Electronic Physics. - 2020. - Vol.12, №1.-Art. 01022. - Doi: 10.21272/jnep.12(1).01022. - URL: https://jnep.sumdu.edu.ua/en/full_article/2945 |
| Abstract: | Al₂O₃ and Al₂O₃/ZrO₂ multilayer coatings were deposited by the magnetron method by sputtering the corresponding metal targets in a mixture of oxygen and argon gases. The microstructure of the cross sections to determine the thickness and elemental composition of the obtained coatings was studied by transmission and scanning electron microscopy. The surface morphology of Al₂O₃ coating samples was studied by scanning probe microscop |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/41857 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Kolesnikov_Production.pdf | 365.34 kB | Adobe PDF | View/Open |
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