Structure and mechanical properties of TiAlSiY vacuum-arc coatings deposited in nitrogen atmosphere

Abstract

The effect of a negative bias potential applied to the substrate on elemental composition, structure, and mechanical properties of vacuum-arc TiAlSiY nitride coatings is investigated by different methods. It is ascertained that applying a high (up to –500 V) bias voltage leads to a selective sputtering of target as well as significant microdeformation of the coating, small-sized growth of crystallites, and their preferred orientation along the [110] direction