http://dspace.bsu.edu.ru/handle/123456789/21801
Название: | Influence of the angle of inclination of the plasma flow of carbon to the substrate on the electrical capacitance and morphology of the surface of carbon coatings |
Авторы: | Sudzhanskaya, I. V. Poplavsky, А. I. Goncharov, I. Y. Glukhov, O. V. |
Ключевые слова: | equipment technology chemical engineering nanotechnology carbon films electrical capacity conductivity morphology surface |
Дата публикации: | 2017 |
Библиографическое описание: | Influence of the angle of inclination of the plasma flow of carbon to the substrate on the electrical capacitance and morphology of the surface of carbon coatings / I.V. Sudzhanskaya [и др.] // Journal of nano- and electronic physics. - 2017. - Vol.9, N6.-P. 06027-1-06027-3. |
Краткий осмотр (реферат): | Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed |
URI (Унифицированный идентификатор ресурса): | http://dspace.bsu.edu.ru/handle/123456789/21801 |
Располагается в коллекциях: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
Файл | Описание | Размер | Формат | |
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Sudzhanskaya_Influence.pdf | 406.78 kB | Adobe PDF | Просмотреть/Открыть |
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