Single layer and multilayer vacuum-arc coatings based on the nitride tialsiyn: composition, structure, properties

Abstract

Using high-technological vacuum-arc evaporation in the atmosphere of nitrogen with ion bombardment, single- and multilayer coatings based on TiAlSiYN with high mechanical characteristics were obtained: hardness of the coatings reached 49.5 GPA, resistance to wear, with the value of the critical point LC5 reaching 184.92 N. The mechanisms of structure formation, defining the resulting mechanical characteristics of single- and multi-layer coatings based on TiAlSiYN nitride have been discussed