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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 147

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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 1 2 0 9 22 14 1

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Kolpakov_The Effect that Nitrogen.pdf 48

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