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Browsing by Subject magnetron by sputtering

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Issue DateTitleAuthor(s)
2020Production, Structure and Properties of Coatings Based on Al₂O₃ Obtained by Magnetron MethodKolesnikov, D. A.; Sudzhanskaya, I. V.; Novikov, V. Yu.; Kudryavtsev, E. A.; Krytsyna, E. V.