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| Оптические свойства пленок SiC, SiC₀.₇N₀.₃, Si₃N₄, полученных методом магнетронного напыления | 0 | 1 | 1 | 7 | 5 | 6 | 0 |
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| Zakhvalinskiy_Opticheskie_svoystva.pdf | 29 |
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