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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
2014
RF-Magnetron sputtering of Si3N4 and study of Si3N4/p-Si heterostructures
Zakhvalinskii, V. S.
;
Goncharov, I. Yu.
;
Kudryavtsev, E. A.
;
Piluk, E. A.
;
Kolesnikov, D. A.
