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Browsing by Author Abakumov, P. V.
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
2015
Temperature influence on the properties of thin Si₃N₄ films
Zakhvalinskii, V. S.
;
Abakumov, P. V.
;
Piljuk, E. A.
;
Rodriguez, G. V.
;
Goncharov, I. Yu.
;
Taran, S. V.
